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 Spin rinse dryers                                              **±¹³»¿Ü ÁÖ¿ä ³³Ç°Ã³

         Model JS2D is designed to dry two or four carriers simultaneously.
¡¡ With a clean filter installed in the upper part, clean air is constantly introduced to the inside of
¡¡ the machine to keep the chamber clean. (Optional D.I rinsing available)

 

Áß°í spin rinse dryer

 

 

 

Catalog.pdf

 

 

Option

    -Static eliminator(ionizer)
    -
    Hot air generator  

    - Can be automated with  robot    system                         
    -
    Cradles of different sizes
    -
    D.I water rinsing mechanism
    -
    N2 blow mechanism
    -
    Special specifications/Spin dryers   available for glass substrates and   ceramic substrates.

 

2, 4 cassettes type

Model   JS2D-150, JS2D-200, JS2D-300
2~4 carrier type

  2, 4-carrier type available: 2, 4, 5, 6 inch wafer
  2-carrier type for 8 inch
Model JS2D-200 and 12 inch
Model JS2D-300

Rotating speed ¡¡Spin 0¢¦900rpm(variable)
   
Dry 0¢¦900rpm(variable)
Processing time ¡¡Spin0¢¦999.9sec(variable)
¡¡
Dry0¢¦999.9sec(variable)

Rinse

  D.I water rinse ( optional)

Auto Balancing

  optional

HEPA, ULPA filter    0.3¥ìm, filtration 99.99% or over.
Lid    Automatically opened/closed
Exhaust    Auto damper provided
Power supply    3¥õ AC220V, 50/60Hz¡¡3¥õ 380V AC, 50/60Hz

 

 

 

 

 

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