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Option
-Static
eliminator(ionizer) -Hot air
generator
- Can be automated with robot system -Cradles of different
sizes -D.I
water rinsing
mechanism -N2 blow mechanism -Special
specifications/Spin dryers available for glass substrates and ceramic
substrates.
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2,
4 cassettes type
Model |
JS2D-150, JS2D-200, JS2D-300 |
2~4 carrier type |
2, 4-carrier type available: 2, 4, 5, 6 inch wafer
2-carrier type for 8
inch Model JS2D-200
and 12 inch
Model JS2D-300
|
Rotating speed |
¡¡Spin
0¢¦900rpm(variable) Dry
0¢¦900rpm(variable)
|
Processing time |
¡¡Spin0¢¦999.9sec(variable) ¡¡Dry0¢¦999.9sec(variable) |
Rinse
|
D.I water rinse (
optional)
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Auto Balancing
|
optional
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HEPA, ULPA filter |
0.3¥ìm, filtration 99.99% or
over. |
Lid |
Automatically opened/closed |
Exhaust |
Auto damper provided |
Power supply |
3¥õ AC220V, 50/60Hz¡¡3¥õ
380V AC, 50/60Hz |
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