ÀÚµ¿ ½ºÀ®¾ÏÇü µð½ºÆæ¼ Æ÷ÇÔ
• Plate
Size(Max.) : 300mm diameter
• Process step : 10 steps/ program,
• Memory Storage : 20 Programs
• Rotation Speed : 10 ~ 1500 rpm
• °øÁ¤¼ø¼:
»ê, ¾ËÄ®¸® ½ºÇÁ·¹ÀÌ -¼ø¼ö ¸°½º -
N2 ½ºÇÉ µå¶óÀÌ
• Çö»ó º¸¿ï
¹× è¹ö ¹è±â; 150A
• Acceleration ratio setup, Max. 10000RPM/sec
w/o load
• Run Time : 1~999sec, 0.1 ÃÊ
´ÜÀ§·Î ÀÔÃâ·Â
• µð½ºÆæ¼:
»ê ¶Ç´Â ¾ËÄ®¸® ¼ö¿ë¾× ½ºÇÁ·¹ÀÌ ³ëÁñ, ³ëÁñ°¢µµ(65~105µµ) Á¶Àý
Swing arm ŸÀÔ ½ºÇÁ·¹ÀÌ
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