LCD
touch screen
Mask Size:
500mmx500mm or less
Chamber Material:
SUS 304 Body Size/ Material:
1050Wx1250DX1800H mm/SUS Spin Motor:
AC servo Motor Spin Rotation:
Max. 2000~3000 RPM Brush Rotation:
50~200 RPM Rotation Controller:
PLC Brush Material:
Nylon, PVA sponge Megasonic:
1 MHz Power Supply:
AC200V N2 source:
0.2MPa , 50L/min, Ø6 connection Air source:
0.4MPa , 20L/min, Ø6 connection Pure Water source:
0.2MPa, 10L/min, PT1/2 connection Drainage:
2 lines, PVC-25A Exhaust:
2 lines, PVC-100A |