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Megasonic Mask & Glass Cleaner, GMBC-500M

 

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  • Spin Speed Repeatability: < 0.05 %
  • Spin Speed Resolution: < 0.05%
  • Substrate Sizes (upto 500x500mm square)ÄÚÅÍ ¸ðµ¨ JS401Àº À缺¿£Áö´Ï¾î¸µÀÇ ±âº»ÀÌ µÇ´Â Á¦Ç°À¸·Î½á, 2003³â °³¹ßµÈ ÀÌ·¡, °è¼Ó ÁøÈ­µÇ°í ÀÖÀ¸¸ç µ¿±Þ»ç¾çÀÇ ¿Ü»ê

 

 

Reliability

  • Aluminium and stainless 304 construction
  • Compact sized
  • 1 MHz megasonic cleaning
  • Brush cleaning, N2 dry
  • 1 ³â°£ Ç°Áú º¸Áõ ( ºÎÇ° ¹× ÀηÂ)
  • °í°´¿¡ ´ëÇÑ ¹«Á¦ÇÑ application
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ÇÁ·Î±×·¥ ¹× Hardware

 

 

LCD touch screen

Mask Size:     500mmx500mm or less

Chamber Material:     SUS 304

Body Size/ Material: 1050Wx1250DX1800H mm/SUS

Spin Motor:     AC servo Motor

Spin Rotation:     Max. 2000~3000 RPM

Brush Rotation:     50~200 RPM

Rotation Controller:     PLC

Brush Material:     Nylon, PVA sponge

Megasonic:     1 MHz

Power Supply:     AC200V

N2 source:     0.2MPa , 50L/min, Ø6 connection

Air source:     0.4MPa , 20L/min, Ø6 connection

Pure Water source:     0.2MPa, 10L/min, PT1/2 connection

Drainage:     2 lines, PVC-25A

Exhaust:     2 lines, PVC-100A

 

 

 

 

 

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