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Nano spray coating system, 모델 RoboCoat-500


    재성엔지니어링의 자동 spray coating system은 직교좌표 로봇에 의한 최상의 균일한 코팅 조건을 제공합니다. 본 스프레이 코팅 시스템은 코팅하려는 시료를 10 마이크론의 크기로 atomizing 시켜 분무하는 동시에. 시료를 균일하게 가열하면서 코팅 작업을 수행합니다.

  • Max substrate size:   500x500 mm
  • Ultrasonic spray(or special air spray) coating:   Spray nozzle programmable parameters: Speed (X-Y-Z axis), absolute position, dispensing flow rate
  • Nano spray:    Thin, uniform, defect-free coating application down to sub-micron thickness.
  • Max. hot chuck temperature: 80 °C
  • Flow pumps for spray coating:    Precise flow control 10µl/s up to 200µl/s for low viscosity resists , water soluble liquids, solar cell fluxing, fuel cell coating and carbon nano tube coating.




  • Anodized aluminum and All polished stainless 304 construction
  • HEPA filter located on the bottom of the system
  • Exhaust port
  • Optional Heated spin chuck
  • Optional UV and NIR curing
  • 1 년간 품질 보증 ( 부품 및 인력)
  • 고객에 대한 무제한 application 제공


프로그램 및 Hardware

  • 10" color LCD touch screen
  • 5 process programs
  • X-Y-Z position settable in mm
  • Speed on X, Y axis:  1 second resolution for step times
  • X, Y moving speed:      0 - 200mm/ sec.
  • Z stroke adjustable automatically
  • Heated chuck
  • Programmable logic controller (PLC) system controller
  • Standardl dispenser-Precise flow control 10µl/s up to 200µl/s for low viscosity liquids 
  •  Heated  chuck: Max 80 °C






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