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Nano spray coating
system, ¸ðµ¨ Spincube-100
½ºÇÁ·¹ÀÌÄÚÅÍ,
¸ðµ¨ Spincube 100Àº Á÷±³ÁÂÇ¥ ·Îº¿ ¹× ½ºÇÉ È¦´õ¿¡ ÀÇÇÑ ÃÖ»óÀÇ
±ÕÀÏÇÑ ÄÚÆà Á¶°ÇÀ» Á¦°øÇÕ´Ï´Ù. º» ½ºÇÁ·¹ÀÌ ÄÚÆà ½Ã½ºÅÛÀº
ÃÊÀ½ÆÄ ³ëÁñÀ» Àû¿ëÇÏ¿© ÄÚÆÃÇÏ·Á´Â ½Ã·á¸¦ 10 ¸¶ÀÌÅ©·ÐÀÇ Å©±â·Î atomizing
½ÃÄÑ ºÐ¹«ÇÏ´Â µ¿½Ã¿¡, ½Ã·á¸¦ ȸÀü½ÃÄÑ ±ÕÀÏÇÑ ÄÚÆÃ
ÀÛ¾÷À» ¼öÇàÇÕ´Ï´Ù.
- Max
substrate size: up to 150x150 mm
- Ultrasonic
spray(or special air spray) coating: Spray coating
programmable parameters:
Speed (Y-axis), spin speed, dispensing flow rate
- Nano
spray:
Thin, uniform, defect-free coating application down to sub-micron
thickness.
- Flow
pumps for spray coating: Precise flow control 10µl/s up to 200µl/s for low
viscosity resists , water soluble liquids, solar cell fluxing, fuel cell coating and carbon nano tube coating.
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